High-aspect-ratio nanoimprint process chains
نویسندگان
چکیده
منابع مشابه
Micro/nanopatterning of proteins via contact printing using high aspect ratio PMMA stamps and nanoimprint apparatus.
Micro- and nanoscale protein patterns have been produced via a new contact printing method using a nanoimprint lithography apparatus. The main novelty of the technique is the use of poly(methyl methacrylate) (PMMA) instead of the commonly used poly(dimethylsiloxane) (PDMS) stamps. This avoids printing problems due to roof collapse, which limits the usable aspect ratio in microcontact printing t...
متن کاملFabrication of high aspect ratio structures by soft UV nanoimprint lithography
We report on results of the fabrication of high aspect ratio structures by soft UV assisted nanoimprint lithography. In particular, we describe a tri-layer process which allows us to obtain a high process latitude with a good compatibility to the commonly used pattern transfer techniques such as lift-off. We show the fabrication of arrays of different geometries (pillars, stripes) over large ar...
متن کاملSYNTHESIS OF HIGH ASPECT RATIO SILVER NANOWIRES: PARAMETRIC STUDY OF THE POLYOL PROCESS
Silver nanowires (AgNWs) are considered as one-dimensional nanostructures, which have received much attention due to their nanoscale size, high aspect ratio, high electrical and thermal conductivity, optical transparency and high mechanical stability. Preparation of AgNWs by polyol process is remarkably sensitive to the interactions between synthesis parameters. In this study, the effect of the...
متن کاملManufacturing High Aspect Ratio Microturbine by Isothermal Microforging Process
Manufacturing High Aspect Ratio Microturbine by Isothermal Microforging Process Chunju Wang a b c , Chuanjie Wang a b , Debin Shan a b c , Bin Guo a b c & Jie Xu c a National Key Laboratory for Precision Hot Processing of Metals , Harbin , China b School of Materials Science and Engineering , Harbin Institute of Technology , Harbin , China c Key Laboratory of Micro-Systems and Micro-Structures ...
متن کاملApproaches to High Aspect Ratio Triangulations
In aerospace computational uid dynamics calculations, high aspect ratio, or stretched, triangulations are often used to adequately resolve the features of a viscous ow around bodies. In this paper, we explore alternatives to the Delaunay triangulation which can be used to generate high aspect ratio triangulations of point sets. The method is based on a variation of the lifting map concept which...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Microsystems & Nanoengineering
سال: 2017
ISSN: 2055-7434
DOI: 10.1038/micronano.2017.17